Jun 1, 2004
This work describes the application of model-based control system design techniques to rapid thermal processing (RTP). The work considers all aspects of the distributed temperature control problem from physics-based modeling to implementation of the real-time embedded...
Nov 1, 2000
Dec 1, 1999
Sep 1, 1999
In this white paper, we describe the numerical simulation of CVD process for epitaxial growth of silicon using trichlorosilane (SiHCl3). This study uses the one-step, finite-rate chemistry for the 2-D reactor geometry from the literature, and successfully reproduces...
Sep 1, 1999
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