Oct 3, 2013
Detecting the health and proper operation of equipment during manufacturing is an important part of maintaining high yields. This paper describes a model-based approach to detecting changes in equipment during manufacturing. Physics-based mathematical models of the...
Mar 13, 2013
This article presents the implementation of a calibration procedure for a finite element (FE) model of a state highway bridge using sensory data measured on the bridge. The objective is to modify the high-fidelity FE model of the bridge so that its dynamic behaviour...
Dec 13, 2012
Multivariable Nyquist eigenloci provide a much richer family of curves as compared to the SISO case. The eigenloci may be computed symbolically in many simple cases. Inspection of the generalized Nyquist eigenloci plot allows the determination of the exact values of...
Oct 3, 2012
This paper describes the development of a COMSOL model of Electro-Chemical-Mechanical Planarization (ECMP) that was validated with experimental data. ECMP is used for processing of semiconductor wafers. We developed a 2D model of flow of phosphoric acid solution (the...
Sep 1, 2012
Many modern thermal processing systems involve temperature control of heated plates. In many systems such as Metal-Organic Chemical Vapor Deposition (MOCVD) and epitaxial deposition (Epi) systems, the plates are often thick carriers or susceptors on which one or more...
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