Sep 1, 2012
Many modern thermal processing systems involve temperature control of heated plates. In many systems such as Metal-Organic Chemical Vapor Deposition (MOCVD) and epitaxial deposition (Epi) systems, the plates are often thick carriers or susceptors on which one or more...
Apr 26, 2012
A Finite Element (FE) model which can precisely predict the actual dynamic responses of a bridge is necessary for accurate condition assessment and health monitoring purposes. However, most of the bridge FE models initially developed for design purposes may not be...
Sep 1, 2011
Many modern thermal processing systems involve temperature control of heated plates. In most Rapid Thermal Processing (RTP) systems, the ‘plate’ is a single wafer that is heated from one or both sides by an array of tungsten halogen lamps. In many other systems such...
Mar 7, 2010
In this paper we focus on the optimal placement of sensors for state estimation-based continuous health monitoring of structures using three approaches. The first aims to minimize the static estimation error of the structure deflections, using the linear stiffness...
Dec 9, 2008
A semiconductor wafer undergoes a wide range of processes before it is transformed from a bare silicon wafer to one populated with millions of transistor circuits. Such processes include Physical or Chemical Vapor Deposition, (PVD, CVD), Chemical-Mechanical...
