Reactor-Scale Models for RF Diode Sputtering of Metal Thin-Films
S. Desa, S. Ghosal, R. Kosut, J. L. Ebert, T. E. Abrahamson, A. Kozak, W. Zou, X. W. Zhou, J. F. Groves, and H. N. G. Wadley
Journal of Vacuum Science & Technology A, Vol. 17, No. 4, pp. 1926-1933, 1999.