Sep 1, 2012
Many modern thermal processing systems involve temperature control of heated plates. In many systems such as Metal-Organic Chemical Vapor Deposition (MOCVD) and epitaxial deposition (Epi) systems, the plates are often thick carriers or susceptors on which one or more...
Sep 1, 2011
Many modern thermal processing systems involve temperature control of heated plates. In most Rapid Thermal Processing (RTP) systems, the ‘plate’ is a single wafer that is heated from one or both sides by an array of tungsten halogen lamps. In many other systems such...
Jun 7, 2010
In this paper, we present results on estimating material model parameters from inverse analysis of full-field deformation data that was obtained with a prototype of a novel integrated tool consisting of a digital image correlation system and software for data analysis...
May 20, 2007
An all-digital cantilever controller for magnetic resonance force microscopy (MRFM) was developed through a close collaboration between SC Solutions, Cornell University, and the U.S. Army Research Laboratory. The advantage of an all-digital controller is its absence...
Jun 30, 2004
Radio frequency (RF) diode sputtering is widely used for depositing Giant Magneto-Resistive (GMR) thin films for multilayers, spin valves, and spin-dependent tunneling (SDT) devices used in data storage, computer memory, etc. However, the thin films thus produced...
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