Jun 30, 2004
The research described in this tutorial paper involves an effort for physical modeling and model-based sensing and control of CMP systems. A dynamic model of a rotational CMP process is developed, as well as simulation software. This dynamic model is used for...
Jun 30, 2004
A semiconductor wafer undergoes a wide range of processes before it is transformed from a bare silicon wafer to one populated with millions of transistor circuits. Such processes include physical or chemical vapor deposition, (PVD, CVD), chemical-mechanical...
Jun 30, 2004
Radio frequency (RF) diode sputtering is widely used for depositing Giant Magneto-Resistive (GMR) thin films for multilayers, spin valves, and spin-dependent tunneling (SDT) devices used in data storage, computer memory, etc. However, the thin films thus produced...
Jun 1, 2004
This work describes the application of model-based control system design techniques to rapid thermal processing (RTP). The work considers all aspects of the distributed temperature control problem from physics-based modeling to implementation of the real-time embedded...
Mar 21, 2004
The problem addressed is to design a detector which is maximally sensitive to specific quantum states. Here we concentrate on quantum state detection using the worst-case a posteriori probability of detection as the design criterion. This objective is equivalent to...
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