Model-Based Temperature/CD Tuning of Multi-Zone Heated Plates

Driven by ever-increasing requirements on improved wafer temperature uniformity for smaller features on the wafer, equipment manufacturers are developing heated plates (or chucks) with more and more actuator zones to achieve finer resolution of the actuated heat. From...

Feedback Control of Dynamic Systems – Seventh Edition

Feedback Control of Dynamic Systems, 7/e covers the material that every engineer, and most scientists and prospective managers, needs to know about feedback control, including concepts like stability, tracking, and robustness. Each chapter presents the fundamentals...

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