May 10, 2018
In this talk, Dr. Ebert describes a set of applications where SC used COMSOL Multiphysics® for modeling. These models span the transport of heat, fluids and chemical species, structural mechanics, and electrochemistry. In each case, the models were either validated...
Oct 12, 2017
This presentation describes the development of model-based temperature control of the susceptor of a Metal-Organic Chemical Vapor Deposition (MOCVD) reactor. A generic axisymmetric geometry has been used together with representative process conditions to highlight the...
Oct 12, 2017
We have developed a model of a Metal-Organic Chemical Vapor Deposition (MOCVD) reactor using COMSOL Multiphysics, and compared the results by conducting an experimental study. MOCVD is used for the manufacture of Multi-Quantum Well Light Emitting Diodes (MQW LEDs)....
Feb 1, 2017
The research results presented here have demonstrated the feasibility of an innovative temperature control technology for the Metal-Organic Chemical Vapor Deposition (MOCVD) process used in the fabrication of Multi-Quantum Well (MQW) LEDs. The control technology has...
Oct 1, 2016
Driven by ever-increasing requirements on improved wafer temperature uniformity for smaller features on the wafer, equipment manufacturers are developing heated plates (or chucks) with more and more actuator zones to achieve finer resolution of the actuated heat. From...
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