Reactor-scale Modeling of Silicon Epitaxy

Oct 1, 2020

This case study of epitaxial deposition of silicon film on a silicon substrate in a horizontal hot-wall reactor reproduces an earlier modeling study by Habuka et al. [1]. The steady-state finite element (FEM) model incorporates fluid flow, heat transfer, dilute...

SC-MDD™ Macro Defect Scanner

Jul 25, 2020

SC-MDD™ Macro Defect Scanner Rapid In-line Detection of Macro Defects The complexity of integrated circuits (ICs) continues to increase with shrinking device geometries. There is an associated increase in the number of processing steps to manufacture IC’s and...
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