Semiconductor | SC Solutions

Temperature Control of Metal-Organic Chemical Vapor Disposition (MOCVD) Process

Oct 1, 2020

Physics-based MOCVD models are useful in many ways including model-based control, design of next-generation chambers, virtual sensing and process optimization. As a capability demonstration, SC Solutions has developed a finite element (FEM) model of a chamber shown...

SC-MDD™ Macro Defect Scanner

Jul 25, 2020

SC-MDD™ Macro Defect Scanner Rapid In-line Detection of Macro Defects The complexity of integrated circuits (ICs) continues to increase with shrinking device geometries. There is an associated increase in the number of processing steps to manufacture IC’s and...

Applied Materials and SC Solutions Partner on Real-Time Profile Control for 200MM CMP

Jan 14, 2020 | Company, Control Engineering

To meet the need for real-time profile control (RTPC) on Applied Materials 200mm Mirra® CMP tools, Applied turned to its long-time partner, SC Solutions, Inc. Together, the two companies tackled a variety of technical issues. Read this article in the July issue of...

SC Solutions Presents Work on Physics-Informed Machine Learning at the APC Conference 31 — 2019

Oct 24, 2019 | Control Engineering

SC Solutions was one of the sponsors of the 31st annual Advanced Process Control (APC) Conference in San Antonio, TX on October 28-31, 2019. This year, Dr. Jun Kyu Lee, Dr. Abbas Emami-Naeini and Dr. Dick de Roover attended the conference and presented some...

Model-Based Profile Control for 200mm CMP: Easier than 300mm CMP or Not?

Sep 20, 2018

Motivation The last 3 years have seen an increased demand for analog, MEMS and RF chips, which has led to a shortage in both 200mm fab capacity as well as equipment. This has sparked a new interest among equipment makers to refurbish used 200mm tools, develop entirely...

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