Sep 1, 2003
This paper investigates the application of model-based control design techniques to distributed temperature control systems. Multivariable controllers are an essential part of modern-day rapid thermal processing (RTP) systems. We consider all aspects of the control...
Jan 1, 2001
Part of a collection of contributions written in honor of Professor Brian Anderson's 60th birthday.
Dec 1, 2000
Nov 30, 2000
A reactor-scale model incorporating the principal physical processes involved in RF diode sputtering has been developed and then integrated into a detailed steady-state input-output model of the growth of copper films. The model links critical aspects of the process...
Nov 1, 2000
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