Jun 30, 2004
A semiconductor wafer undergoes a wide range of processes before it is transformed from a bare silicon wafer to one populated with millions of transistor circuits. Such processes include physical or chemical vapor deposition, (PVD, CVD), chemical-mechanical...
Jun 30, 2004
The research described in this tutorial paper involves an effort for physical modeling and model-based sensing and control of CMP systems. A dynamic model of a rotational CMP process is developed, as well as simulation software. This dynamic model is used for...
Jun 1, 2004
This work describes the application of model-based control system design techniques to rapid thermal processing (RTP). The work considers all aspects of the distributed temperature control problem from physics-based modeling to implementation of the real-time embedded...
Mar 21, 2004
The problem addressed is to design a detector which is maximally sensitive to specific quantum states. Here we concentrate on quantum state detection using the worst-case a posteriori probability of detection as the design criterion. This objective is equivalent to...
Sep 1, 2003
This paper investigates the application of model-based control design techniques to distributed temperature control systems. Multivariable controllers are an essential part of modern-day rapid thermal processing (RTP) systems. We consider all aspects of the control...
