Oct 1, 2020
This case study of epitaxial deposition of silicon film on a silicon substrate in a horizontal hot-wall reactor reproduces an earlier modeling study by Habuka et al. [1]. The steady-state finite element (FEM) model incorporates fluid flow, heat transfer, dilute...
Oct 1, 2020
Physics-based MOCVD models are useful in many ways including model-based control, design of next-generation chambers, virtual sensing and process optimization. As a capability demonstration, SC Solutions has developed a finite element (FEM) model of a chamber shown...
Oct 1, 2020
The modeling team at SC Solutions has developed fluid flow models for a broad range of applications for more than two decades. These models have been developed primarily using the commercial finite element (FEM) modeling tool, COMSOL® Multiphysics, for which SC is a...
Aug 24, 2020
Abstract We present a robust control system and methodology for physics-informed artificial intelligence (PAI) used to optimize and improve oil recovery, demonstrated in the Yates Field operated by the Kinder Morgan CO2 company. The system consists of a robust control...
Sep 20, 2018
Motivation The last 3 years have seen an increased demand for analog, MEMS and RF chips, which has led to a shortage in both 200mm fab capacity as well as equipment. This has sparked a new interest among equipment makers to refurbish used 200mm tools, develop entirely...
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