Oct 1, 2016
Driven by ever-increasing requirements on improved wafer temperature uniformity for smaller features on the wafer, equipment manufacturers are developing heated plates (or chucks) with more and more actuator zones to achieve finer resolution of the actuated heat. From...
Jul 14, 2016
Feedback Control of Dynamic Systems, 7/e covers the material that every engineer, and most scientists and prospective managers, needs to know about feedback control, including concepts like stability, tracking, and robustness. Each chapter presents the fundamentals...
Dec 9, 2015
Characterizing complex quantum systems is a vital task in quantum information science. Quantum tomography, the standard tool used for this purpose, uses a well-designed measurement record to reconstruct quantum states and processes. It is, however, notoriously...
Oct 1, 2015
Driven by ever-increasing requirements on improved wafer temperature uniformity for smaller features on the wafer, equipment manufacturers are developing heated plates (or chucks) with more and more actuator zones to achieve finer resolution of the actuated heat. From...
Oct 1, 2014
The manufacturing of Integrated Circuits (ICs) on semiconductor wafers involves hundreds of complex and expensive process steps. Defects can occur during any of several steps such as etch, resist removal, particle contamination, incomplete process, process variations,...
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