Dec 6, 2021
This Case Study describes an approach to combining physical principles with Machine Learning (ML) for modeling and control of complex systems. Our approach was developed as part of a DARPA-funded research project. It was applied to oil reservoir management. While this...
Oct 1, 2020
This case study of epitaxial deposition of silicon film on a silicon substrate in a horizontal hot-wall reactor reproduces an earlier modeling study by Habuka et al. [1]. The steady-state finite element (FEM) model incorporates fluid flow, heat transfer, dilute...
Oct 1, 2020
Physics-based MOCVD models are useful in many ways including model-based control, design of next-generation chambers, virtual sensing and process optimization. As a capability demonstration, SC Solutions has developed a finite element (FEM) model of a chamber shown...
Oct 1, 2020
The modeling team at SC Solutions has developed fluid flow models for a broad range of applications for more than two decades. These models have been developed primarily using the commercial finite element (FEM) modeling tool, COMSOL® Multiphysics, for which SC is a...
Nov 30, 2000
A reactor-scale model incorporating the principal physical processes involved in RF diode sputtering has been developed and then integrated into a detailed steady-state input-output model of the growth of copper films. The model links critical aspects of the process...
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