Jun 30, 2004
A semiconductor wafer undergoes a wide range of processes before it is transformed from a bare silicon wafer to one populated with millions of transistor circuits. Such processes include physical or chemical vapor deposition, (PVD, CVD), chemical-mechanical...
Jun 30, 2004
Radio frequency (RF) diode sputtering is widely used for depositing Giant Magneto-Resistive (GMR) thin films for multilayers, spin valves, and spin-dependent tunneling (SDT) devices used in data storage, computer memory, etc. However, the thin films thus produced...
Sep 1, 2003
This paper investigates the application of model-based control design techniques to distributed temperature control systems. Multivariable controllers are an essential part of modern-day rapid thermal processing (RTP) systems. We consider all aspects of the control...
Apr 17, 2002
All large structures are vulnerable to earthquake damage. Local failures or total collapse of such structures represent not only immediate concern for loss of life and repair costs, but also major economic impacts due to loss of service. Engineers are asked to use...
Jan 1, 2002
The Taiwan High Speed Railway is currently one of the world’s largest BOT infrastructure projects. Due for completion in 2003, the railway runs down the western side of Taiwan linking all the main centres of population. A major constraint on the design of the viaducts...
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