Control Methods for Temperature Control of Heated Plates

Many modern thermal processing systems involve temperature control of heated plates. In most Rapid Thermal Processing (RTP) systems, the ‘plate’ is a single wafer that is heated from one or both sides by an array of tungsten halogen lamps. In many other systems such...

Near-Optimal Sensor Placement for Health Monitoring of Civil Structures

In this paper we focus on the optimal placement of sensors for state estimation-based continuous health monitoring of structures using three approaches.  The first aims to minimize the static estimation error of the structure deflections, using the linear stiffness...

Control in Semiconductor Wafer Manufacturing

A semiconductor wafer undergoes a wide range of processes before it is transformed from a bare silicon wafer to one populated with millions of transistor circuits. Such processes include Physical or Chemical Vapor Deposition, (PVD, CVD), Chemical-Mechanical...
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