Nov 12, 2004
A number of problems in quantum state and system identification are addressed. Specifically, it is shown that the maximum likelihood estimation (MLE) approach, already known to apply to quantum state tomography, is also applicable to quantum process tomography...
Jun 30, 2004
A semiconductor wafer undergoes a wide range of processes before it is transformed from a bare silicon wafer to one populated with millions of transistor circuits. Such processes include physical or chemical vapor deposition, (PVD, CVD), chemical-mechanical...
Jun 30, 2004
The research described in this tutorial paper involves an effort for physical modeling and model-based sensing and control of CMP systems. A dynamic model of a rotational CMP process is developed, as well as simulation software. This dynamic model is used for...
Jun 30, 2004
Radio frequency (RF) diode sputtering is widely used for depositing Giant Magneto-Resistive (GMR) thin films for multilayers, spin valves, and spin-dependent tunneling (SDT) devices used in data storage, computer memory, etc. However, the thin films thus produced...
Jun 1, 2004
This work describes the application of model-based control system design techniques to rapid thermal processing (RTP). The work considers all aspects of the distributed temperature control problem from physics-based modeling to implementation of the real-time embedded...
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