Jun 30, 2004
A semiconductor wafer undergoes a wide range of processes before it is transformed from a bare silicon wafer to one populated with millions of transistor circuits. Such processes include physical or chemical vapor deposition, (PVD, CVD), chemical-mechanical...
Jun 30, 2004
The research described in this tutorial paper involves an effort for physical modeling and model-based sensing and control of CMP systems. A dynamic model of a rotational CMP process is developed, as well as simulation software. This dynamic model is used for...
Jun 30, 2004
Radio frequency (RF) diode sputtering is widely used for depositing Giant Magneto-Resistive (GMR) thin films for multilayers, spin valves, and spin-dependent tunneling (SDT) devices used in data storage, computer memory, etc. However, the thin films thus produced...
Jun 1, 2004
This work describes the application of model-based control system design techniques to rapid thermal processing (RTP). The work considers all aspects of the distributed temperature control problem from physics-based modeling to implementation of the real-time embedded...
Mar 21, 2004
The problem addressed is to design a detector which is maximally sensitive to specific quantum states. Here we concentrate on quantum state detection using the worst-case a posteriori probability of detection as the design criterion. This objective is equivalent to...
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