May 10, 2018
In this talk, Dr. Ebert describes a set of applications where SC used COMSOL Multiphysics® for modeling. These models span the transport of heat, fluids and chemical species, structural mechanics, and electrochemistry. In each case, the models were either validated...
Oct 3, 2012
This paper describes the development of a COMSOL model of Electro-Chemical-Mechanical Planarization (ECMP) that was validated with experimental data. ECMP is used for processing of semiconductor wafers. We developed a 2D model of flow of phosphoric acid solution (the...
Jun 29, 2011
In this paper we focus on comparing three candidate approaches to the optimal placement of sensors for state estimation-based continuous health monitoring of structures. The first aims to minimize the static estimation error of the structure deflections, using the...
Jun 7, 2010
In this paper, we present results on estimating material model parameters from inverse analysis of full-field deformation data that was obtained with a prototype of a novel integrated tool consisting of a digital image correlation system and software for data analysis...
Nov 30, 2000
A reactor-scale model incorporating the principal physical processes involved in RF diode sputtering has been developed and then integrated into a detailed steady-state input-output model of the growth of copper films. The model links critical aspects of the process...
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