Sep 1, 2011
Many modern thermal processing systems involve temperature control of heated plates. In most Rapid Thermal Processing (RTP) systems, the ‘plate’ is a single wafer that is heated from one or both sides by an array of tungsten halogen lamps. In many other systems such...
Dec 9, 2008
A semiconductor wafer undergoes a wide range of processes before it is transformed from a bare silicon wafer to one populated with millions of transistor circuits. Such processes include Physical or Chemical Vapor Deposition, (PVD, CVD), Chemical-Mechanical...
Sep 17, 2008
Apr 16, 2007
Methods of optimal control are applied to a model system of interacting two-level particles (e.g., spin-half atomic nuclei or electrons or two-level atoms) to produce high-fidelity quantum gates while simultaneously negating the detrimental effect of decoherence. One...
Jun 30, 2004
A semiconductor wafer undergoes a wide range of processes before it is transformed from a bare silicon wafer to one populated with millions of transistor circuits. Such processes include physical or chemical vapor deposition, (PVD, CVD), chemical-mechanical...
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