Sep 1, 2012
Many modern thermal processing systems involve temperature control of heated plates. In many systems such as Metal-Organic Chemical Vapor Deposition (MOCVD) and epitaxial deposition (Epi) systems, the plates are often thick carriers or susceptors on which one or more...
Sep 1, 2011
Many modern thermal processing systems involve temperature control of heated plates. In most Rapid Thermal Processing (RTP) systems, the ‘plate’ is a single wafer that is heated from one or both sides by an array of tungsten halogen lamps. In many other systems such...
Dec 9, 2008
A semiconductor wafer undergoes a wide range of processes before it is transformed from a bare silicon wafer to one populated with millions of transistor circuits. Such processes include Physical or Chemical Vapor Deposition, (PVD, CVD), Chemical-Mechanical...
Sep 17, 2008
Apr 16, 2007
Methods of optimal control are applied to a model system of interacting two-level particles (e.g., spin-half atomic nuclei or electrons or two-level atoms) to produce high-fidelity quantum gates while simultaneously negating the detrimental effect of decoherence. One...
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