This presentation explains how SC Solutions’ fast, control-oriented, physics-based models can be used as components of digital twins (DT) of semiconductor equipment.

The standards document on digital twin framework for manufacturing (ISO 23247*) defines a digital twin (DT) as a “fit for purpose digital representation of an observable manufacturing element with synchronization between the element and its digital representation.”  For this talk, we define DT in simpler terms as a purpose-driven dynamic model of a wafer processing system with predictive capabilities:

  • A DT simulation runs faster than real time and describes the system’s change in behavior with time with acceptable accuracy.
  • DT is dynamically updated with sensor data.
  • DT is not quite a digital replica of the system. Outputs are probabilistic, not deterministic.
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