Control Design & Implementation

Modeling and Control of Distributed Thermal Systems

Sep 1, 2003

This paper investigates the application of model-based control design techniques to distributed temperature control systems. Multivariable controllers are an essential part of modern-day rapid thermal processing (RTP) systems. We consider all aspects of the control...

Iterative Adaptive Control: Windsurfing with Confidence

Jan 1, 2001

Part of a collection of contributions written in honor of Professor Brian Anderson's 60th birthday.

On Achieving Reduced Error Propagation Sensitivity in DFE Design via Convex Optimization

Dec 1, 2000

Command Shaping for MIMO Nonlinear Systems Using Iterative Learning Control with Application to an RTP System

Nov 1, 2000

Control of Sputter Process for Improved Run-to-Run Repeatability

Oct 1, 2000

Radio frequency (RF) diode sputtering deposition is a widely used process for depositing GMR thin films for multilayers, spin valves, spin-dependent tunneling (SDT) devices, etc. However, the thin films thus produced often show significant variation in GMR properties...