Dec 1, 1998
Dec 1, 1998
Run-to-run control using static linear models is examined. Conditions are presented for stability, (statistical) performance, and robustness using standard control theory. A simulation example shows the usefulness of the method applied to a rapid thermal oxidation...
Sep 9, 1998
Oct 5, 1997
Gelcasting is a new method for manufacturing advanced structural ceramics for use, for example, in the aerospace industry. The process involves a drying stage, where moisture, which constitutes approximately a quarter of the mass of the part, is removed in a...
Sep 3, 1997
General finite element models of single wafer systems that describe both the dynamics of the solids as well as the gases are usually unsuited for quick design iterations, because of the computational complexity. In this paper a computationally more efficient...
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