May 2, 1999
A 2D model of MOCVD reactor has been developed for deposition of YBCO thin films. System characterization showed the need for control of growth rate, deposition uniformity, and oxide stoichiometry at the surface. A run-to-run control architecture was developed, and is...
Dec 1, 1998
Dec 1, 1998
Run-to-run control using static linear models is examined. Conditions are presented for stability, (statistical) performance, and robustness using standard control theory. A simulation example shows the usefulness of the method applied to a rapid thermal oxidation...
Sep 9, 1998
Oct 5, 1997
Gelcasting is a new method for manufacturing advanced structural ceramics for use, for example, in the aerospace industry. The process involves a drying stage, where moisture, which constitutes approximately a quarter of the mass of the part, is removed in a...
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