Control in Semiconductor Wafer Manufacturing

A semiconductor wafer undergoes a wide range of processes before it is transformed from a bare silicon wafer to one populated with millions of transistor circuits. Such processes include Physical or Chemical Vapor Deposition, (PVD, CVD), Chemical-Mechanical...

Active Control of Flow Over a Backward-Facing Step

We describe a control-oriented model reduction process from partial differential equation (PDE) descriptions of aerodynamic flow systems, and the design of low-order feedback controllers using these procedures. An effective approach for flow model reduction for active...
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